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Department of Physics and Astronomy
Department of Chemistry and Earth Sciences
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CAM > Facilities > Cleanroom

Equipment

- Thin Film Deposition

Glovebox System with Spincoaters and Thermal Evaporators


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Sputtering System

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Electron-Beam Evaporator HVB-130


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- Dry Etching

MARCH (Nordson) reactive ion etching system


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- Lithography / Top Down Patterning

Electron-Beam Writer Raith eLINE Plus


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SUSS MicroTec Mask Aligner MA/BA6 Gen4

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- Hoods and Benches

Work Benches, Fume Hoods and Flow Boxes


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Centre for Advanced Materials
Im Neuenheimer Feld 225
D-69120 Heidelberg

Phone: 06221-54 19 999
geschaeftsstelle@cam.uni-heidelberg.de
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