Profilometer DektakXT

The DektakXT (Bruker) is a tactile surface profilometer for the measurement of surface topography in a wide range of applications including determination of the layer thickness of metallic, organic or dielectric films. It allows for extraction of surface (line)-profiles with resolutions below 1 nm (vertical) and 4 µm (lateral), respectively. Depending on the chosen resolution up to 1 mm high features can be measured.

The software also enables measurement of 3D topography through repeated line traces.

For more information please contact Maximilian Litterst.

 
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Centre for Advanced Materials
Im Neuenheimer Feld 225
D-69120 Heidelberg

Phone: 06221-54 19 999
geschaeftsstelle@cam.uni-heidelberg.de
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